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GRADUATE INSTITUTE of NATURAL and APPLIED SCIENCES / DEPARTMENT of MECHANICAL ENGINEERING
Doctorate
Course Catalog
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FBE
GRADUATE INSTITUTE of NATURAL and APPLIED SCIENCES / DEPARTMENT of MECHANICAL ENGINEERING / Doctorate
Katalog Ana Sayfa
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MAK7340Vacuum Technology3+0+0ECTS:7.5
Year / SemesterSpring Semester
Level of CourseThird Cycle
Status Elective
DepartmentDEPARTMENT of MECHANICAL ENGINEERING
Prerequisites and co-requisitesNone
Mode of Delivery
Contact Hours14 weeks - 3 hours of lectures per week
LecturerProf. Dr. Tevfik KÜÇÜKÖMEROĞLU
Co-LecturerNone
Language of instructionTurkish
Professional practise ( internship ) None
 
The aim of the course:
The objectives of the lecture are that students the basic knowledge about manufacturing and operating characteristic of vacuum systems.
 
Programme OutcomesCTPOTOA
Upon successful completion of the course, the students will be able to :
PO - 1 : to know vacuum. 1,21,3,5,
PO - 2 : to know vacuum spares and working principles. 1,21,3,5,
PO - 3 : to bulding of vacuum systems. 1,21,3,5,
PO - 4 : to know coating systems at vacuum. 1,21,3,5,
CTPO : Contribution to programme outcomes, TOA :Type of assessment (1: written exam, 2: Oral exam, 3: Homework assignment, 4: Laboratory exercise/exam, 5: Seminar / presentation, 6: Term paper), PO : Learning Outcome

 
Contents of the Course
Introduction in vacuum. Vacuum pumps and pumping mechanism. Vacuum gauges. Vacuum system design and operating. Some application of vacuum technology. Vacuum deposition techniques.
 
Course Syllabus
 WeekSubjectRelated Notes / Files
 Week 1Introduction in vacuum.
 Week 2Vacuum pumps and pumping mechanism.
 Week 3Vacuum pumps and pumping mechanism.
 Week 4Vacuum gauges.
 Week 5Vacuum gauges.
 Week 6Vacuum systems.
 Week 7Seals.
 Week 8Vacuum system design and operating.
 Week 9Mid-term exam
 Week 10Some application of vacuum technology.
 Week 11Vacuum deposition techniques.
 Week 12Vacuum deposition techniques.
 Week 13Presentation of homework.
 Week 14Presentation of homework.
 Week 15Presentation of homework.
 Week 16End-of-term exam
 
Textbook / Material
1Weissler G. L., 1979; Methods of Experimental Physics, Volume 14, Vacuum Physics and Technology, Academic Press, Inc. New York
2Tarımcı, Ç. Sarı, H. 2006; Vakum Tekniği, Sözkesen Matbaacılık, Ankara
 
Recommended Reading
1Manhan J. E., 2000; Physical Vapor Deposition of Thin Films, John Wiley and Sons, Inc. Canada
2Mattox D. M., 1998; Handbook of Physical Vapor Deposition (PVD) Processing, Noyes Publications, USA
 
Method of Assessment
Type of assessmentWeek NoDate

Duration (hours)Weight (%)
Mid-term exam 9 27/04/2023 1 30
Quiz 12 25/05/2023 1 20
End-of-term exam 16 15/06/2023 1 50
 
Student Work Load and its Distribution
Type of workDuration (hours pw)

No of weeks / Number of activity

Hours in total per term
Yüz yüze eğitim 3 15 45
Sınıf dışı çalışma 5 14 70
Laboratuar çalışması 3 1 3
Arasınav için hazırlık 3 4 12
Arasınav 1 2 2
Ödev 4 3 12
Kısa sınav 2 1 2
Dönem sonu sınavı için hazırlık 4 3 12
Dönem sonu sınavı 2 1 2
Total work load160